Vertical device architecture

ABSTRACT

In some embodiments, the present disclosure relates to a vertical transistor device, and an associated method of formation. The transistor device has a source region over a substrate and a vertical channel bar over the source region. The vertical channel bar has a bottom surface with an elongated shape. A conductive gate region is separated from sidewalls of the vertical channel bar by a gate dielectric layer. The conductive gate region has a vertical leg and a horizontal leg protruding outward from a sidewall of the vertical leg. A dielectric layer vertically extends from a plane extending along an uppermost surface of the conductive gate region to a position surrounded by the conductive gate region. A drain contact is over the vertical channel bar.

REFERENCE TO RELATED APPLICATION

This Application is a Continuation of U.S. application Ser. No.14/318,835 filed on Jun. 30, 2014, the contents of which are herebyincorporated by reference in their entirety.

BACKGROUND

Moore's law states that the number of transistors in an integratedcircuit doubles approximately every two years. To achieve Moore's law,the integrated chip industry has continually decreased the size of(i.e., scaled) integrated chip components. However, in recent years,scaling has become more difficult, as the physical limits of materialsused in integrated chip fabrication are being approached. Thus, as analternative to traditional scaling the semiconductor industry begun touse alternative technologies (e.g., FinFETs) to continue to meet Moore'slaw.

One alternative to traditional silicon planar field effect transistors(FETs), which has recently emerged, is nanowire transistor devices.Nanowire transistor devices use one or more nanowires as a channelregion extending between a source region and a drain region. Thenanowires typically have diameters that are on the order of tennanometers or less, thereby allowing for the formation of a transistordevice that is much smaller than that achievable using conventionalsilicon technology.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1C illustrate some embodiments of a vertical transistor devicehaving vertical channel bars with a rectangular shape extending betweena source region and a drain region.

FIGS. 2A-2B illustrate some embodiments of an integrated chip comprisingvertical transistor devices having vertical channel bars with arectangular shape extending between a source region and a drain region.

FIG. 3 illustrates various embodiments showing vertical channel barconfigurations on a source region of a disclosed vertical transistordevice.

FIG. 4 illustrates some embodiments of an exemplary SRAM layout using adisclosed vertical transistors device with vertical channel bars.

FIG. 5 illustrates a flow diagram of some embodiments of a method offorming a vertical transistor device having vertical channel bars with arectangular shape extending between a source region and a drain region.

FIG. 6 illustrates a flow diagram of some alternative embodiments of amethod of forming an integrated chip having vertical transistor deviceswith vertical channel bars having a rectangular shape extending betweena source region and a drain region.

FIGS. 7-18 illustrate some embodiments of cross-sectional views showinga method of forming a vertical transistor device having vertical channelbars with a rectangular shape extending between a source region and adrain region.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Vertical nanowire transistor devices often comprise a nanowire having acircular or square cross-section, which is vertically disposed betweenan underlying source region and an overlying drain region. Duringoperation of a vertical nanowire transistor, a voltage applied to a gateregion (i.e., a gate electrode) surrounding the nanowire at a positionvertically located between the source region and the drain region, maycause current to either flow through the nanowire or be pinched off.

Because of the small size of nanowires (e.g., typically between 0.1 nmand 10 nm), single nanowires are unable to carry enough current betweena source region and a drain region to make an efficient transistordevice. Therefore, often a plurality of parallel nanowires are locatedbetween a source region and a drain region of a same vertical transistordevice. Since the plurality of parallel nanowires are under the controlof a same gate region, the plurality of parallel nanowires are able tooperate as a single transistor device.

The present disclosure relates to a vertical transistor device withimproved performance and cell area density, comprising vertical channelbars having a rectangular shape extending between a source region and adrain region, and an associated method of formation. In someembodiments, the vertical transistor device comprises a source regiondisposed over a semiconductor substrate. A channel region comprising oneor more vertical channel bars is disposed over the source region. Theone or more vertical channel bars have a bottom surface abutting thesource region that has a rectangular shape (i.e., a shape with foursides separated by four right angles, with adjacent sides havingdifferent length). The vertical transistor device further comprises agate region overlying the source region at a position surrounding theone or more vertical channel bars, and a drain region disposed over thegate region and the one or more vertical channel bars. The rectangularshape of the vertical channel bars allows for improvements inperformance and cell area density in the disclosed vertical transistordevice, relative to a vertical transistors device using circular orsquare nanowires.

FIG. 1A illustrates a three-dimensional view of some embodiments of avertical transistor device 100 having vertical channel bars 108 with arectangular shape extending between a source region 104 and a drainregion 110.

The vertical transistor device 100 comprises a source region 104overlying a semiconductor substrate 102. In some embodiments, the sourceregion 104 comprises a highly doped region having a first doping type(e.g., an n-type doping or a p-type doping with a doping concentrationof greater than approximately 10¹⁷ atoms/cm³). In various embodiments,the semiconductor substrate 102 may comprise any type of semiconductorbody (e.g., silicon, silicon germanium (SiGe), SOI, etc.) such as asemiconductor wafer or one or more die on a wafer, as well as any othertype of semiconductor and/or epitaxial layers formed thereon and/orotherwise associated therewith.

One or more vertical channel bars, 108 a and 108 b, are disposed overthe source region 104. The one or more vertical channel bars, 108 a and108 b, form a channel region 109 of the vertical transistor device 100.The one or more vertical channel bars, 108 a and 108 b, have a bottomsurface 107 abutting a top surface of the source region 104. The bottomsurface 107 has a rectangular shape with adjacent sides having un-equallengths. In some embodiments, the one or more vertical channel bars, 108a and 108 b, have a second doping type that is different than the firstdoping type (e.g., a p-type doping or an n-type doping) of the sourceregion 104. In other embodiments, the one or more vertical channel bars,108 a and 108 b, may comprise a non-doped material. In some embodiments,the vertical channel bars, 108 a and 108 b, may comprise a semiconductormaterial such as silicon (Si), silicon germanium (SiGe), germanium (Ge),indium arsenide (InAs), Gallium arsenide (GaAs), etc. Although verticaltransistor device 100 illustrates two vertical channel bars, 108 a and108 b, it will be appreciated that such an embodiment is not intended ina limiting sense. Rather, a disclosed vertical transistor device 100 mayhave any number of vertical channel bars (e.g., 1, 2, 3, 4, etc.).

A drain region 110 is disposed over the one or more vertical channelbars, 108 a and 108 b. The drain region 110 abuts a top surface(opposing bottom surface 107) of the vertical channel bars, 108 a and108 b, such that the vertical channel bars, 108 a and 108 b, extendbetween the source region 104 and the drain region 110. In someembodiments, the drain region 110 comprises a highly doped region havingthe first doping type of the source region 104 (e.g., an n-type dopingor a p-type doping with a doping concentration of greater thanapproximately 10¹⁷ atoms/cm³).

A gate region 106 comprising a conductive material is verticallydisposed between the source region 104 and the drain region 110 at aposition adjacent to the one or more vertical channel bars, 108 a and108 b. During operation of the vertical transistor device 100, a voltagemay be selectively applied to the gate region 106. The applied voltagecauses the gate region 106 to control the flow of charge carriers 111along the vertical channel bars, 108 a and 108 b, between the sourceregion 104 and the drain region 110. In some embodiments, the gateregion 106 surrounds the one or more vertical channel bars, 108 a and108 b, so as to form a gate-all-around (GAA) transistor device.

FIG. 1B illustrates some embodiments of a top-view 112 of the verticaltransistor device 100.

As shown in top-view 112, the vertical channel bars, 108 a and 108 b,that are disposed between the source region 104 and the drain region 110have a rectangular shape with four sides separated by right angles. Therectangular shape of the vertical channel bars, 108 a and 108 b, causesadjacent sides to have different lengths. For example, the verticalchannel bars, 108 a and 108 b, respectively have a first two opposingsides with a length l and a second two opposing sides with a width w,wherein the length l has a larger value than the width w. In someembodiments, the first two opposing sides of the plurality of verticalchannel bars, 108 a and 108 b, are oriented in parallel to each other inan area over the source region 104 (i.e., first two opposing sides ofthe first vertical channel bar 108 a are oriented in parallel with firsttwo opposing sides of the second channel bar 108 b).

In some embodiments, the length l of the vertical channel bars, 108 aand 108 b, may be in a range of between approximately 4 times andapproximately 20 times the value of the width w of the vertical channelbars, 108 a and 108 b. For example, in some embodiments, the length lmay have a value that is between approximately 20 nm and approximately100 nm and the width w may have a value that is between approximately 5nm and approximately 10 nm. In other embodiments, the length l and widthw may have smaller values or values that vary depending upon a desiredtransistor device characteristic. It will be appreciated that increasingan area in which the gate region 106 surrounds elements of the channelregion 109 also increases the effective width the vertical transistordevice 100. Therefore, the rectangular shape of the one or more verticalchannel bars, 108 a and 108 b, increases the effective width (W_(eff))of the channel region 109 relative to a vertical transistor devicehaving square or circular nanowires

FIG. 1C illustrates some embodiments of a side-view 114 of the verticaltransistor device 100.

As shown in side-view 114, the gate region 106 surrounds the verticalchannel bars, 108 a and 108 b, at a position that is verticallyseparated from the source region 104 and the drain region 110. The gateregion 106 is separated from the vertical channel bars, 108 a and 108 b,by a gate dielectric layer 116 that abuts sidewalls of the verticalchannel bars, 108 a and 108 b.

FIGS. 2A-2B illustrate some embodiments of an integrated chip 200comprising vertical transistor devices, 201 a and 201 b, having verticalchannel bars 108 with a rectangular shape extending between one or moresource regions 104 and one or more drain regions 216.

FIG. 2A illustrates some embodiments of a side-view of the integratedchip 200.

The integrated chip 200 comprises an isolation region 204 (e.g., ashallow trench isolation region) disposed between source regions 104 ofvertical transistor devices 201 a and 201 b. In some embodiments, thesource regions 104 may be disposed within one or more well regions 202located within a semiconductor substrate 102. In such embodiments, thesource regions 104 have a different doping type than the one or morewell regions 202 (e.g., the source regions 104 may have a first dopingtype, while the well region(s) 202 may have a second doping typedifferent than the first doping type). A first insulating layer 206 isdisposed over the source regions 104. In various embodiments, the firstinsulating layer 206 may comprise one or more different dielectriclayers. In some embodiments, the first insulating layer 206 may compriseone or more of silicon-dioxide (SiO₂), silicon nitride (SiN), siliconcarbon-nitride (SiCN), silicon carbon oxy-nitride (SiCON), etc.

A gate dielectric layer 208 is disposed over the first insulating layer206. In some embodiments, the gate dielectric layer 208 may comprise ahigh-k gate dielectric material such as hafnium oxide (HfOx), zirconiumoxide (ZrOx), or aluminum oxide (Al₂O₃), for example. The gatedielectric layer 208 may comprise an ‘L’ shaped structure having ahorizontal leg 208 a and a vertical leg 208 b. The horizontal leg 208 ais oriented in parallel to a top surface of the source regions 104 andthe vertical leg 208 b is oriented in parallel to a sidewall of verticalchannel bars 108.

A gate region 210 is disposed over the gate dielectric layer 208. Thefirst insulating layer 206 and the gate dielectric layer 208 areconfigured to electrically isolate the source region 104 from the gateregion 210. The gate region 210 comprises a conductive material (e.g.,metal or polysilicon). In some embodiments, the gate region 210 maycomprise one or more different layers. For example, in some embodiments,the gate region 210 may comprise a first gate layer 210 a comprising agate work function layer including a material selected to give avertical transistor device, 201 a and 201 b, a selected work function,and an overlying second gate layer 210 b comprising a gate metal layer.In some embodiments, the first gate layer 210 a may comprise titaniumnitride (TiN), tantalum nitride (TaN), titanium aluminum carbide(TiAlC), tantalum aluminum carbide (TaAlC), etc. In some embodiments,the second gate layer 210 b may comprise tungsten (W) or aluminum (Al),for example. In some embodiments, the gate region 210 may also comprisean ‘L’ shaped structure.

A dielectric layer 212 is disposed over the gate region 210. In variousembodiments, the dielectric layer 212 may comprise one or more differentdielectric layers. In some embodiments, the dielectric layer 212 maycomprise a first dielectric layer 212 a disposed onto the gate region210, and an overlying inter-level (ILD) dielectric layer 212 b. In someembodiments, the first dielectric layer 212 a may comprise siliconnitride (SiN), silicon carbon nitride (SiCN), silicon carbon oxy-nitride(SiCON), etc. In some embodiments, the ILD layer 212 b may comprisesilicon dioxide (SiO₂), phosphorous silicon glass (PSG), boron siliconglass (BSG).

A drain spacer 214 is disposed over the gate region 210 and thedielectric layer 212 at positions laterally disposed between thevertical channel bars 108. The drain spacer 214 is configured toelectrically isolate the gate region 210 from a drain region 216. Insome embodiments, the drain region 216 may comprise one or more separatedrain contacts 217 (e.g., a conductive material such as a metal). Insome embodiments, the drain spacer 214 may comprise one or more ofsilicon dioxide (SiO₂), silicon nitride (SiN), silicon carbon nitride(SiCN), silicon carbon oxy-nitride (SiCON), for example.

FIG. 2B illustrates some embodiments of a top-view 218 of the integratedchip 200. As shown in the top-view 218, the side view of the integratedchip 200 (shown in FIG. 2A) is taken along cross-sectional line A-A′.

FIG. 3 illustrates various embodiments of top-views, 300 a-300 c,showing vertical channel bar configurations on a source region of adisclosed vertical transistor device.

A first top-view 300 a of a vertical transistor device illustrates aplurality of single wire channels 304 located over a source region 302.The plurality of single wire channels 304 have square cross-sections(e.g., have four sides with equal lengths). Spacing between theplurality of single wire channels 304 causes the source region 302 tohave a length l₁ and a width w₁.

A second top-view 300 b of a vertical transistor device illustrates aplurality of vertical channel bars 308 located over a source region 306.The plurality of vertical channel bars 308 have rectangularcross-sections with a length that extends in a direction that isparallel to a length (i.e., a larger dimension) of the source region 306(i.e., so that a long side of the plurality of vertical channel bars 308is oriented in parallel with a long side of the source region 306).

Spacing between the plurality of vertical channel bars 308 causes thesource region 306 to have a length l₂ and width w₂, which arerespectively smaller than the length l₁ and width w₁ of the verticaltransistor device shown in top-view 300 a (since the vertical channelbars 308 are formed by a self aligned process as described in relationto method 600). In some embodiments, replacement of the plurality ofsingle wire channels 304 with the plurality of vertical channel bars 308could reduce a size of a source region by 1.2 times or more.

A third top-view 300 c of a vertical transistor device illustrates aplurality of vertical channel bars 310 located over a source region 306.The plurality of vertical channel bars 310 have rectangularcross-sections with a length that extend in a direction that isperpendicular to a length (i.e., a larger dimension) of the sourceregion 306 (i.e., that is perpendicular to vertical channel bars 308).

Top-views 300 d-300 k illustrate alternative embodiments of verticaltransistor devices having a plurality vertical channel bars 308 locatedat different locations over a source region 306. In various embodiments,the plurality of vertical channel bars 308 may have different locationsover the source region 306 for various reasons. For example, in someembodiments, the different location of the vertical channel bars 308relative to the source region 306 may be due to misalignment duringfabrication. In such embodiments, the replacement of the plurality ofsingle wire channels 304 with the plurality of vertical channel bars 308can mitigate alignment problems due to the length of the verticalchannel bars 308 (e.g., since even with misalignment, the plurality ofvertical channel bars 308 still have a large intersection with thesource region 306, so as to mitigate misalignment issues).

FIG. 4 illustrate some embodiments of schematic diagram 400 of an 6 TSRAM (static random access memory) cell and a corresponding exemplarySRAM layout 402 comprising vertical transistors devices having verticalchannel bars.

As illustrated in schematic diagram 400, the 6 T SRAM cell comprises sixtransistor devices T1-T6. Transistors T2, T3, T4, and T5 form twocross-coupled inverters (e.g., a first inverter comprising T2 and T3 anda second inverter comprising T4 and T5) configured to store data. Twoadditional access transistors T1 and T6 serve to control access to theSRAM cell during read and write operations by way of bit lines BL, BLBand word lines WL.

The SRAM layout 402 comprises gate regions, 404 a and 404 b, overlyingactive regions 406, which may be connected by a conductive path 410.Vertical channel bars 408 are configured to extend through gate regions404 a to form access transistors T1 and T6. Vertical channel bars 408are configured to extend through gate regions 404 b to form transistorsT2, T3, T4, and T5. By using vertical channel bars 408 to formtransistors T1-T6, the size of the SRAM layout 402 can be reducedrelative to SRAMs using transistors devices having single wire channels.

FIG. 5 illustrates a flow diagram of some embodiments of a method 500 offorming a vertical transistor device having vertical channel bars with arectangular shape extending between a source region and a drain region.

While disclosed methods (e.g., methods 500 and 600) are illustrated anddescribed herein as a series of acts or events, it will be appreciatedthat the illustrated ordering of such acts or events are not to beinterpreted in a limiting sense. For example, some acts may occur indifferent orders and/or concurrently with other acts or events apartfrom those illustrated and/or described herein. In addition, not allillustrated acts may be required to implement one or more aspects orembodiments of the description herein. Further, one or more of the actsdepicted herein may be carried out in one or more separate acts and/orphases.

At 502, a source region is formed over a semiconductor substrate.

At 504, one or more vertical channel bar(s) having rectangular shapesare formed at positions overlying the source region. The rectangularshape of the vertical channel bars causes adjacent sides of the verticalchannel bars to have different lengths.

At 506, a gate region is formed to abut the one or more vertical channelbar(s) at positions overlying the source region.

At 508, a drain region is formed over the one or more vertical channelbar(s). By forming the drain region over the one or more verticalchannel bar(s), the one or more vertical channel bar(s) extend betweenthe source region and the drain region.

FIG. 6 illustrates a flow diagram of some alternative embodiments of amethod 600 of forming an integrated chip having vertical transistordevices with vertical channel bars having a rectangular shape extendingbetween a source region and a drain region.

At 602, a device channel layer overlying a source layer is selectivelyetched to form a plurality of vertical channel bars over the sourcelayer.

At 604, the source layer is selectively etched, according to a firstmasking structure comprising the vertical channel bars, to form a trenchthat spatially separates source regions of adjacent vertical transistordevices.

At 606, an isolation region is formed within the trench.

At 608, a gate dielectric layer and a gate layer are formed onto thesubstrate at positions that extend between and over the vertical channelbars.

At 610, the gate layer is etched back from over the one or more verticalchannel bars.

At 612, the gate layer is selectively etched, according to a secondmasking structure comprising the vertical channel bars, to formspatially separate gate regions of adjacent vertical transistor devices.

At 614 a planarization process is performed.

At 616, a drain region is formed over the one or more vertical channelbars.

FIGS. 7-18 illustrate some embodiments of cross-sectional views showinga method of forming a vertical transistor device having vertical channelbars with a rectangular shape extending between a source region and adrain region. Although FIGS. 7-18 are described in relation to themethod 600, it will be appreciated that the structures disclosed inFIGS. 7-18 are not limited to the method 600, but instead may standalone as structures independent of the method 600. Similarly, althoughthe method 600 is described in relation to FIGS. 7-18, it will beappreciated that the method 600 is not limited to the structuresdisclosed in FIGS. 7-18, but instead may stand alone independent of thestructures disclosed in FIGS. 7-18.

FIG. 7 illustrates some embodiments of a cross-sectional view 700corresponding to act 602.

As shown in cross-sectional view 700, a device channel layer 706 isdisposed on a source layer 704 located over a semiconductor substrate102. In some embodiments, the source layer 704 may be formed byselectively implanting the semiconductor substrate 102 with a dopantspecies. In some embodiments, the source layer 704 may be disposedwithin a well region 702 formed within the semiconductor substrate 102.In such embodiments, the source layer 704 has a different doping typethan the well region 702. For example, the source layer 704 may have afirst doping type, while the well region 702 may have a second dopingtype different than the first doping type. In various embodiments, thedevice channel layer 706 may comprise silicon (Si), silicon germanium(SiGe), germanium (Ge), etc.

A masking layer 708 is selectively formed over the device channel layer706 at positions that define one or more vertical channel bars 108(e.g., the masking layer 708 may be formed at positions that overlie thepositions of the vertical channel bars 108). The device channel layer706 is then exposed to a first etchant 710. The first etchant 710 isconfigured to remove the device channel layer 706 from areas not coveredby the masking layer 708, resulting in the formation of the one or morevertical channel bars 108 on the source layer 704. In some embodiments,the first etchant 710 may comprise a wet etchant (e.g., having dilutedhydrochloric acid (HCl)) or a dry etchant (e.g., having an etchingchemistry comprising one or more of fluorine (F), Tetrafluoromethane(CF₄), ozone (O₂), or C₄F₈ (Octafluorocyclobutane)).

FIGS. 8-9 illustrate some embodiments of cross-sectional views, 800 and900, corresponding to act 604.

As shown in cross-sectional view 800, vertical channel bar spacers 801are formed on opposing sides of the vertical channel bars 108. Thevertical channel bar spacers 801 may be formed by depositing one or moredielectric layers. For example, a first dielectric layer 802 and asecond dielectric layer 804 may be deposited between the verticalchannel bars 108. After deposition, the first and second dielectriclayers, 802 and 804, may be selectively etched, using an anisotropicetch, to form the vertical channel bar spacers 801. The anisotropic etchresults in the formation of vertical channel bar spacers 801 onsidewalls of the vertical channel bars 108.

As shown in cross-sectional view 900, a photoresist layer 902 is formedbetween the vertical channel bars 108 of a same vertical transistordevice. For example, as shown in cross-sectional view 800, verticalchannel bars 108 a and 108 b are shared by a first vertical transistordevice 903 a, while vertical channel bars 108 c and 108 d are shared bya second vertical transistor device 903 b. The vertical channel barspacers 801, the photoresist layer 902, and the vertical channel bars108, collectively form a first masking structure 905.

After formation of the photoresist layer 902, the source layer 704 isselectively exposed to a second etchant 904, which is configured to etchthe source layer 704 according to the first masking structure 905 toform a trench 906 located between spatially separated source regions,104 a and 104 b, of adjacent vertical transistor devices, 903 a and 903b. By using the vertical channel bar spacers 801 as part of the firstmaking structures 905 that defines the spatially separated sourceregions, 104 a and 104 b, can be formed close together, thereby allowingfor source regions, 104 a and 104 b, having a relatively small area.

FIGS. 10-11 illustrate some embodiments of cross-sectional views, 1000and 1100, corresponding to act 606.

As shown in cross-sectional view 1000, a dielectric material 1002 isformed within the trench 906 and between adjacent vertical channel bars108. In some embodiments, the dielectric material 1002 may comprise anoxide formed by way of a deposition process. A planarization process isthen performed. The planarization process removes excess of thedielectric material 1002 and/or masking layer 708, thereby forming aplanar top surface 1004.

As shown in cross-sectional view 1100, the dielectric material 1002 isexposed to a third etchant 1102 configured to etch back the dielectricmaterial 1002 to form an isolation region 204 (e.g., a shallow trenchisolation region) at a position laterally between the spatiallyseparated source regions, 104 a and 104 b. In some embodiments, theisolation region 204 may have a top surface that is aligned with a topsurface of the spatially separated source regions, 104 a and 104 b. Thevertical channel bar spacers 801 are also removed (e.g., by selectiveetching) after the etch back. In some embodiments, a source silicidelayer 1104 may be formed within the spatially separated source regions,104 a and 104 b, at positions adjacent to the vertical channel bars 108.Although the source silicide layer 1104 is illustrated as being formedin cross-sectional view 1100, it will be appreciated that in otherembodiments, it may be formed at other points in the process.

FIG. 12 illustrates some embodiments of a cross-sectional view 1200corresponding to act 608.

As shown in cross-sectional view 1200, an insulating layer 1202 isformed over the spatially separated source regions, 104 a and 104 b, andthe isolation region 204. In various embodiments, the insulating layer1202 may comprise a first insulating layer 1202 a and an overlyingsecond insulating layer 1202 b. In some embodiments, the first andsecond insulating layers, 1202 a and 1202 b, may comprise one or more ofsilicon-dioxide (SiO₂), silicon nitride (SiN), silicon carbon-nitride(SiCN), silicon carbon oxy-nitride (SiCON), etc.

A gate dielectric layer 1204 is subsequently formed over the firstinsulating layer 1202 and a gate layer 1206 is formed over the gatedielectric layer 1204. The gate dielectric layer 1204 and the gate layer1206 are formed at positions that extend between and over the verticalchannel bars 108. In some embodiments, the gate dielectric layer 1204and the gate layer 1206 may be formed by way of a vapor depositiontechnique (e.g., CVD, PVD, etc.) or by way of atomic layer deposition(ALD). In some embodiments, the deposition may cause the gate dielectriclayer 1204 and the gate layer 1206 to comprise ‘L’ shaped structures. Insome embodiments, the gate dielectric layer 1204 may comprise a high-kgate dielectric material (e.g., such as hafnium oxide (HfOx), zirconiumoxide (ZrOx), Aluminum oxide (Al2O3), etc.). In some embodiments, thegate layer 1206 may include a first gate layer 1206 a comprising amaterial (e.g., TiN, TaN, TiAlC, TaAlC, etc.) selected to adjust a workfunction of an associated transistor device, and an overlying secondgate layer 1206 b comprising a gate metal layer (e.g., W, Al, etc.).

In some embodiments, a dielectric layer 1208 may be disposed over thegate layer 1206. The dielectric layer 1208 may comprise a firstdielectric layer 1208 a and an overlying inter-level dielectric (ILD)layer 1208 b. In some embodiments, the first dielectric layer 1208 a maycomprise silicon nitride (SiN), silicon carbon nitride (SiCN), siliconcarbon oxy-nitride (SiCON), etc. In some embodiments, the ILD layer 1208b may comprise silicon dioxide, phosphorous silicon glass (PSG), boronsilicon glass (BSG).

FIG. 13 illustrates some embodiments of a cross-sectional view 1300corresponding to act 610.

As shown in cross-sectional view 1300, the gate dielectric layer 1204and the gate layer 1206 are exposed to a fourth etchant 1302 configuredto form a gate dielectric layer 1204′ and the gate layer 1206′ byetching back the gate dielectric layer 1204 and the gate layer 1206 fromover one or more vertical channel bars 108. Etching back the gatedielectric layer 1204 and the gate layer 1206 exposes the verticalchannels bars 108 in areas that are vertically over the dielectric layer1208 (i.e., so that an upper part of the vertical channel bars 108 aresurrounded by the gate dielectric layer 1204′, while a second upper partof the vertical channel bars 108 are not surrounded by the gatedielectric layer 1204′).

FIGS. 14-16 illustrates some embodiments of cross-sectional views,1400-1600, corresponding to act 612.

As shown in cross-sectional view 1400, a spacer material comprising anelectrically insulating material is deposited onto the substrate andselectively etched to form drain spacers 1402 on opposing sides of thevertical channel bars 108. In some embodiments, the drain spacers 1402may comprise an oxide (e.g., silicon dioxide), silicon nitride (SiN),silicon carbon-nitride (SiCN), silicon carbon oxy-nitride (SiCON), etc.

As shown in cross-sectional view 1500, a patterning layer 1501 is formedover the drain spacers 1402 and the dielectric layer 212. The patterninglayer 1501 may comprise one or more masking layers 1502-1506 formed overthe dielectric layer 212. The drain spacers 1402, the vertical channelbars 108, and the patterning layer 1501 form a second masking structureused in selectively etching the gate layer 1206′. The gate layer 1206′is exposed to a fifth etchant 1510 according to the second maskingstructure to form a cavity 1508 that forms spatially separated gateregions 210 for adjacent vertical transistor devices. After etching, thepatterning layer 1501 is removed, as shown in cross-sectional view 1600.

FIG. 17 illustrates some embodiments of a cross-sectional view 1700corresponding to act 614.

As shown in cross-sectional view 1700, a planarization process isperformed. In some embodiments, an additional ILD layer 1702 may beformed surrounding the drain spacers 1402 prior to the planarizationprocess. The planarization process removes the masking layer 708 and apart of the drain spacers 214 and the additional ILD layer 1702, therebyforming a planar top surface 1704, and also defining a length of thevertical channel bars 108 between the spatially separated sourceregions, 104 a and 104 b, and a subsequently formed drain region.

FIG. 18 illustrates some embodiments of a cross-sectional view 1800corresponding to act 616.

As shown in cross-sectional view 1800, drain regions 216 are formed overone or more vertical channel bars 108. In some embodiments, the drainregions 216 may be formed by forming a doped silicon material over thevertical channel bars 108 and then selectively etching the doped siliconmaterial to define the drain regions 216.

Therefore, the present disclosure relates to a vertical transistordevice having vertical channel bars with an elongated rectangular shape,which extend between a source region and a drain region, and anassociated method of formation.

In some embodiments, the present disclosure relates to a verticaltransistor device. The vertical transistor device includes a sourceregion over a substrate, and a vertical channel bar over the sourceregion. The vertical channel bar has a bottom surface with an elongatedshape. A conductive gate region is separated from sidewalls of thevertical channel bar by a gate dielectric layer. The conductive gateregion comprises a vertical leg and a horizontal leg protruding outwardfrom a sidewall of the vertical leg. A dielectric layer verticallyextends from a plane extending along an uppermost surface of theconductive gate region to a position surrounded by the conductive gateregion. A drain contact is over the vertical channel bar.

In other embodiments, the present disclosure relates to a verticaltransistor device. The vertical transistor device includes a sourceregion over a substrate, and a channel region over the source region.The channel region has a bottom surface with an elongated shape. Aconductive gate region is separated from sidewalls of the channel regionby a gate dielectric layer. The conductive gate region comprises avertical leg and a horizontal leg protruding outward from a sidewall ofthe vertical leg. A drain contact is over the channel region, and adrain spacer is over the conductive gate region and below a lowersurface of the drain contact. The drain spacer laterally surrounds thechannel region and the drain contact. An inter-level dielectric (ILD)layer is laterally separated from the channel region and the draincontact by the drain spacer.

In yet other embodiments, the present disclosure relates to a verticaltransistor device. The vertical transistor device includes a sourcestructure over a substrate and a channel structure over the sourcestructure. The channel structure has a bottom surface with an elongatedshape. A conductive gate structure overlies the source structure at aposition separated from sidewalls of the channel structure by a gatedielectric layer. The conductive gate structure comprises a vertical legand a horizontal leg protruding outward from a sidewall of the verticalleg. The gate dielectric layer separates the conductive gate structurefrom a plane extending along a topmost surface of the source structure.A drain contact is over the channel structure.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A vertical transistor device, comprising: asource region over a substrate; a vertical channel bar over the sourceregion, wherein the vertical channel bar has a bottom surface with anelongated shape; a conductive gate region separated from sidewalls ofthe vertical channel bar by a gate dielectric layer, wherein theconductive gate region comprises a vertical leg and a horizontal legprotruding outward from a sidewall of the vertical leg; a dielectriclayer vertically extending from a plane extending along an uppermostsurface of the conductive gate region to a position surrounded by theconductive gate region; and a drain contact over the vertical channelbar.
 2. The device of claim 1, wherein the source region comprises aprotrusion extending outward from an upper surface of the source regionat a location directly under the vertical channel bar; and wherein theprotrusion has a tapered sidewall that causes a width of the protrusionto decrease as a distance from the vertical channel bar decreases. 3.The device of claim 2, wherein the vertical channel bar has a maximumwidth that is smaller than a maximum width of the protrusion.
 4. Thedevice of claim 1, further comprising: a second source region over thesubstrate; a second vertical channel bar over the second source region,wherein the second vertical channel bar has a bottom surface with asecond elongated shape; a second conductive gate region separated fromsidewalls of the second vertical channel bar by a second gate dielectriclayer; and an isolation structure separating the source region from thesecond source region.
 5. The device of claim 4, wherein the conductivegate region is laterally separated from the second conductive gateregion by a dielectric material that overlies the isolation structure.6. The device of claim 4, further comprising: a drain spacer over theconductive gate region and below a lower surface of the drain contact;and an inter-level dielectric (ILD) layer extending from a planeextending along an uppermost surface of the drain spacer to between theconductive gate region and the second conductive gate region.
 7. Thedevice of claim 4, further comprising: an insulating layer on and incontact with a top surface of the isolation structure and below theconductive gate region and the second conductive gate region.
 8. Thedevice of claim 1, wherein the vertical channel bar laterally straddlesan edge of the source region.
 9. The device of claim 1, furthercomprising: an insulating layer on and in contact with the sourceregion, wherein the insulating layer separates the source region from abottom surface of the gate dielectric layer.
 10. The device of claim 1,wherein the gate dielectric layer separates the conductive gate regionfrom a plane extending along a topmost surface of the source region. 11.The device of claim 1, wherein the gate dielectric layer has abottommost surface extending along a plane that intersects a sidewall ofthe vertical channel bar.
 12. The device of claim 1, wherein the sourceregion comprises a protrusion extending outward from an upper surface ofthe source region directly under the vertical channel bar; and wherein asource silicide layer is disposed within the source region at locationslaterally surrounding the protrusion.
 13. A vertical transistor device,comprising: a source region over a substrate; a channel region over thesource region, wherein the channel region has a bottom surface with anelongated shape; a conductive gate region separated from sidewalls ofthe channel region by a gate dielectric layer, wherein the conductivegate region comprises a vertical leg and a horizontal leg protrudingoutward from a sidewall of the vertical leg; a drain contact over thechannel region; a drain spacer over the conductive gate region and belowa lower surface of the drain contact, wherein the drain spacer laterallysurrounds the channel region and the drain contact; and an inter-leveldielectric (ILD) layer laterally separated from the channel region andthe drain contact by the drain spacer.
 14. The device of claim 13,wherein the source region comprises a protrusion extending outward froman upper surface of the source region at a location directly under thechannel region; and wherein the channel region has a maximum width thatis smaller than a maximum width of the protrusion.
 15. The device ofclaim 13, wherein the gate dielectric layer separates the conductivegate region from a plane extending along a topmost surface of the sourceregion.
 16. The device of claim 13, wherein the gate dielectric layerhas a bottommost surface extending along a plane that intersects asidewall of the channel region.
 17. A vertical transistor device,comprising: a source structure over a substrate; a channel structureover the source structure, wherein the channel structure has a bottomsurface with an elongated shape; a conductive gate structure overlyingthe source structure at a position separated from sidewalls of thechannel structure by a gate dielectric layer, wherein the conductivegate structure comprises a vertical leg and a horizontal leg protrudingoutward from a sidewall of the vertical leg, and wherein the gatedielectric layer separates the conductive gate structure from a planeextending along a topmost surface of the source structure; and a draincontact over the channel structure.
 18. The device of claim 17, furthercomprising: a drain spacer laterally surrounding the channel structureand the drain contact; and an inter-level dielectric (ILD) layerlaterally separated from the channel structure and the drain contact bythe drain spacer.
 19. The device of claim 17, wherein the channelstructure has a length extending in a first direction perpendicular to anormal vector extending from an upper surface of the source structure,and a width extending in a second direction perpendicular to the firstdirection and to the normal vector; and wherein the length is in a rangeof between approximately 4 times and approximately 20 times the width.20. The device of claim 17, wherein the gate dielectric layer has abottommost surface extending along a plane that intersects a sidewall ofthe channel structure.